利用高Al組分-(AlGa)2O3緩沖層在藍(lán)寶石襯底上優(yōu)化生長(zhǎng)高質(zhì)量-Ga2O3厚膜Growth of high quality - Ga2O3 thick film on sapphire by using high Al content - (AlGa)2O3 buffer layer張赫之大連理工大學(xué)副教授ZHANG HezhiAssociate professor of Dalian University of Technology